Nordiko α120

Building on twenty years of experience in delivering RF based ion beam systems Nordiko introduces the α120. This laboratory system comprises a vacuum process module, mounted on a cabinet housing supporting power supplies and power management systems. The system is configured for atmospheric cycling to load samples.

The process module comprises an isolated vacuum chamber housing a broad ion beam source and single platen substrate table. The ion source may be used to project a beam, normally of Argon ions at beam voltages from 100 to 600 V. In the path of the ion beam is a substrate table that provides on-axis rotation of the illuminated substrate and can be presented to the path of the beam at a variable incidence angle.

Features:

Compact configuration - small footprint

  • Customisable
  • 15, 20 or 25 cm RF ion source
  • Filamentless neutraliser
  • Flexible configurable work table
  • High capacity dry pumping group.

Optional Features:

  • Cryogenic pumping
  • Reactive gas etching
  • SIMS end-point detection
  • Vacuum load lock
  • Automation.

A low cost customised ion source solution